Synthesis and H2 gas sensing properties of tin oxide nanohole arrays with various electrodes

被引:28
作者
Hamaguchi, T
Yabuki, N
Uno, M
Yamanaka, S
Egashira, M
Shimizu, Y
Hyodo, T
机构
[1] Osaka Univ, Dept Nucl Engn, Grad Sch Engn, Suita, Osaka 5650871, Japan
[2] Nagasaki Univ, Dept Mat Sci & Engn, Fac Engn, Nagasaki 8528521, Japan
关键词
nanostructure; nanofabrication; thin films; gas sensor;
D O I
10.1016/j.snb.2005.03.062
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
Tin oxide nanohole arrays have been prepared by a liquid phase deposition method. Field emission-type scanning electron microscopy (FE-SEM) and X-ray diffraction (XRD) are used to characterize the surface morphologies and crystal structures of the tin oxide nanohole arrays. Two types of noble metal (Au, Pt, and Pd) electrodes covered with the surface of the tin oxide nanohole arrays, and the gas response of the sensors was measured to H-2 balanced with air. Tin oxide nanohole array sensors exhibited reversible response to H-2 in air. Temperature dependence of the gas response differed between the sensors equipped with a pair of electrodes on both surfaces and the sensors equipped with a couple of inter-digitated electrodes on one side. And H-2 response of the sensors equipped with a pair of electrodes on both surfaces was much higher than that of the sensors equipped with inter-digitated electrodes on one side. (c) 2005 Elsevier B.V All rights reserved.
引用
收藏
页码:852 / 856
页数:5
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