Nanolithography using high transmission nanoscale bowtie apertures

被引：223

作者：

Wang, L ^{[1
]}

Uppuluri, SM ^{[1
]}

Jin, EX ^{[1
]}

Xu, XF ^{[1
]}

机构：

[1] Purdue Univ, Sch Mech Engn, W Lafayette, IN 47907 USA

来源：

NANO LETTERS | 2006年 / 6卷 / 03期

关键词：

D O I：

10.1021/nl052371p

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

We demonstrate that bowtie apertures can be used for contact lithography to achieve nanometer scale resolution. The bowtie apertures with a 30 nm gap size are fabricated in aluminum thin films coated on quartz substrates. Lithography results show that holes of sub-50-nm dimensions can be produced in photoresist by illuminating the apertures with a 355 nm laser beam polarized in the direction across the gap. Experimental results show enhanced transmission and light concentration of bowtie apertures compared to square and rectangular apertures of the same opening area. Finite different time domain simulations are used to explain the experimental results.

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页码：361 / 364

页数：4

相关论文

共 18 条

[1] Imaging the irradiance distribution in the optical near field [J].

Aizenberg, J ;

Rogers, JA ;

Paul, KE ;

Whitesides, GM .

APPLIED PHYSICS LETTERS, 1997, 71 (26) :3773-3775

[2] Sub-diffraction-limited patterning using evanescent near-field optical lithography [J].

Alkaisi, MM ;

Blaikie, RJ ;

McNab, SJ ;

Cheung, R ;

Cumming, DRS .

APPLIED PHYSICS LETTERS, 1999, 75 (22) :3560-3562

[3] Theory of diffraction by small holes [J].

Bethe, HA .

PHYSICAL REVIEW, 1944, 66 (7/8) :163-182

[4] Imaging of optical field confinement in ridge waveguides fabricated on very-small-aperture laser [J].

Chen, F ;

Itagi, A ;

Bain, JA ;

Stancil, DD ;

Schlesinger, TE ;

Stebounova, L ;

Walker, GC ;

Akhremitchev, BB .

APPLIED PHYSICS LETTERS, 2003, 83 (16) :3245-3247

[5] IMPRINT OF SUB-25 NM VIAS AND TRENCHES IN POLYMERS [J].

CHOU, SY ;

KRAUSS, PR ;

RENSTROM, PJ .

APPLIED PHYSICS LETTERS, 1995, 67 (21) :3114-3116

[6] Near field optics: Snapshot of the field emitted by a nanosource using a photosensitive polymer [J].

Davy, S ;

Spajer, M .

APPLIED PHYSICS LETTERS, 1996, 69 (22) :3306-3308

[7] Single quantum dot coupled to a scanning optical antenna: A tunable superemitter [J].

Farahani, JN ;

Pohl, DW ;

Eisler, HJ ;

Hecht, B .

PHYSICAL REVIEW LETTERS, 2005, 95 (01)

[8] Gap-dependent optical coupling of single "Bowtie" nanoantennas resonant in the visible [J].

Fromm, DP ;

Sundaramurthy, A ;

Schuck, PJ ;

Kino, G ;

Moerner, WE .

NANO LETTERS, 2004, 4 (05) :957-961

[9] Optical antenna: Towards a unity efficiency near-field optical probe [J].

Grober, RD ;

Schoelkopf, RJ ;

Prober, DE .

APPLIED PHYSICS LETTERS, 1997, 70 (11) :1354-1356

[10] Obtaining super resolution light spot using surface plasmon assisted sharp ridge nanoaperture [J].

Jin, EX ;

Xu, XF .

APPLIED PHYSICS LETTERS, 2005, 86 (11) :1-3