Electron backscattering diffraction investigation of focused ion beam surfaces

被引:76
作者
Matteson, TL [1 ]
Schwarz, SW
Houge, EC
Kempshall, BW
Giannuzzi, LA
机构
[1] Univ Cent Florida, Orlando, FL 32816 USA
[2] Cirent Semicond Agere Syst, Orlando, FL 32819 USA
关键词
FIB; EBSD; EBSP; Cu; Si; FIB damage; amorphous; TRIM; image quality; dual beam;
D O I
10.1007/s11664-002-0169-5
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A focused ion beam (FIB) instrument has been used to mill surfaces in single-crystal Si and single-crystal Cu for subsequent electron backscattering diffraction (EBSD) analysis. The FIB cuts were performed using a 30 keV and a 5 keV Ga+ ion beam at a stage tilt of 20 to provide a readily obtainable 70degrees surface for direct EBSD investigation in a scanning electron microscope (SEM). The quality of the patterns is related to the amount of FIB damage induced in the Cu and Si. These or similar methods should be directly transferable to a FIB/SEM dual beam instrument equipped with an EBSD detector.
引用
收藏
页码:33 / 39
页数:7
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