Surface silicon-deuterium bond energy from gas-phase equilibration - Comment

被引:2
作者
Herring, C
Van de Walle, CG
机构
[1] Xerox Palo Alto Research Center, Palo Alto, CA 94304
来源
PHYSICAL REVIEW B | 1997年 / 55卷 / 19期
关键词
CRYSTALLINE SILICON; HYDROGEN DIFFUSION;
D O I
10.1103/PhysRevB.55.13314
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
In a recent paper [Phys. Rev. B 48, 4492 (1993)] Wampler, Myers, and Follstaedt (WMF) have reported measurements of equilibrium adsorption of deuterium on cavity walls in crystalline silicon. Their procedure provides in principle a mon reliable source of information regarding the Si-H bond energy than any previous work. Here we propose an analysis of the data that has some advantages over the analysis given by WMF and that yields a significantly higher binding energy. We first argue that the measure of binding most directly following from the observations is the free energy at 800 degrees of a deuterium atom attached to an average surface silicon tetrahedrally bonded to three other silicons, relative to an 800 degrees surface with a ''dangling bond'' at this site and a deuterium at rest far outside: this foe energy is 3.29+/-0.1 eV. We then discuss ways of extracting from this a value for the binding energy Eg at absolute zero, to compare with recent predictions from first-principles quantum-mechanical calculations. This step requires some assumptions about the effect of chemisorption on crystal vibrations; reasonable assumptions give about 3.15 eV. with a probable error modestly larger than that of the 800 degrees C foe energy; the theoretical predictions range above and below this value by one or two tenths of an eV, depending on assumptions about reconstructions.
引用
收藏
页码:13314 / 13318
页数:5
相关论文
共 20 条
[1]  
BINNS MJ, 1994, MATER SCI FORUM, V143-, P861, DOI 10.4028/www.scientific.net/MSF.143-147.861
[2]   VIBRATIONAL-SPECTRA OF HYDROGEN IN SILICON AND GERMANIUM [J].
CARDONA, M .
PHYSICA STATUS SOLIDI B-BASIC RESEARCH, 1983, 118 (02) :463-481
[3]   ELECTRON-PARAMAGNETIC RESONANCE OF HYDROGEN IN SILICON [J].
GORELINSKII, YV ;
NEVINNYI, NN .
PHYSICA B, 1991, 170 (1-4) :155-167
[4]  
Gorelkinskii Yu. V., 1987, Soviet Technical Physics Letters, V13, P45
[5]  
HERRING C, 1991, SEMICONDUCTORS SEMIM, V34, pCH10
[6]   INVERTED ORDER OF ACCEPTOR AND DONOR LEVELS OF MONATOMIC HYDROGEN IN SILICON [J].
JOHNSON, NM ;
HERRING, C ;
VAN DE WALLE, CG .
PHYSICAL REVIEW LETTERS, 1994, 73 (01) :130-133
[7]   INTERSTITIAL HYDROGEN AND NEUTRALIZATION OF SHALLOW-DONOR IMPURITIES IN SINGLE-CRYSTAL SILICON [J].
JOHNSON, NM ;
HERRING, C ;
CHADI, DJ .
PHYSICAL REVIEW LETTERS, 1986, 56 (07) :769-772
[8]   SI-29 HYPERFINE-STRUCTURE OF ANOMALOUS MUONIUM IN SILICON - PROOF OF THE BOND-CENTERED MODEL [J].
KIEFL, RF ;
CELIO, M ;
ESTLE, TL ;
KREITZMAN, SR ;
LUKE, GM ;
RISEMAN, TM ;
ANSALDO, EJ .
PHYSICAL REVIEW LETTERS, 1988, 60 (03) :224-226
[9]   Ab initio study of hydrogen adsorption on the Si(111)-(7X7) surface [J].
Lim, H ;
Cho, K ;
Park, I ;
Joannopoulos, JD ;
Kaxiras, E .
PHYSICAL REVIEW B, 1995, 52 (24) :17231-17237
[10]   HYDROGEN INTERACTIONS WITH CAVITIES IN HELIUM-IMPLANTED SILICON [J].
MYERS, SM ;
FOLLSTAEDT, DM ;
STEIN, HJ ;
WAMPLER, WR .
PHYSICAL REVIEW B, 1993, 47 (20) :13380-13394