Separation of density and viscosity influence on liquid-loaded surface acoustic wave devices

被引:23
作者
Herrmann, F
Hahn, D
Büttgenbach, S
机构
[1] Robert Bosch GmbH, Dept FV FLD, D-70049 Stuttgart, Germany
[2] Robert Bosch GmbH, Dept EW ECA, D-70745 Leinfelden, Germany
[3] Tech Univ Braunschweig, Inst Microtechnol, D-38106 Braunschweig, Germany
关键词
D O I
10.1063/1.123361
中图分类号
O59 [应用物理学];
学科分类号
摘要
Love-mode sensors are reported for separate measurement of liquid density and viscosity. They combine the general merits of Love-mode devices, e.g., ease of sensitivity adjustment and robustness, with a highly effective procedure of separate determination of liquid density and viscosity. A model is proposed to describe the frequency response of the devices to liquid loading. Moreover, design rules are given for further optimization and sensitivity enhancement. (C) 1999 American Institute of Physics. [S0003-6951(99)02222-6].
引用
收藏
页码:3410 / 3412
页数:3
相关论文
共 13 条
[1]  
AULD BA, 1990, ACOUSTIC FIELDS SOLI, V2
[2]  
FURUKAWA S, 1992, P IEEE ULTR S TUSC A, P303
[3]  
GRATE JW, 1995, ACOUSTIC WAVE SENSOR, V8
[5]  
JAKOBY B, 1997, P EUROSENSORS, V11, P919
[6]   MEASUREMENTS OF CONDUCTIVITY AND PH OF LIQUID USING SURFACE ACOUSTIC-WAVE DEVICES [J].
KONDOH, J ;
SHIOKAWA, S .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1992, 31 :82-84
[7]   A LOVE WAVE SENSOR FOR (BIO)CHEMICAL SENSING IN LIQUIDS [J].
KOVACS, G ;
VELLEKOOP, MJ ;
HAUEIS, R ;
LUBKING, GW ;
VENEMA, A .
SENSORS AND ACTUATORS A-PHYSICAL, 1994, 43 (1-3) :38-43
[8]   THEORETICAL COMPARISON OF SENSITIVITIES OF ACOUSTIC SHEAR-WAVE MODES FOR (BIO)CHEMICAL SENSING IN LIQUIDS [J].
KOVACS, G ;
VENEMA, A .
APPLIED PHYSICS LETTERS, 1992, 61 (06) :639-641
[9]  
MARTIN SJ, 1993, PROCEEDINGS OF THE 1993 IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM, P603, DOI 10.1109/FREQ.1993.367450
[10]   CHARACTERIZATION OF SH ACOUSTIC PLATE MODE LIQUID SENSORS [J].
MARTIN, SJ ;
RICCO, AJ ;
NIEMCZYK, TM ;
FRYE, GC .
SENSORS AND ACTUATORS, 1989, 20 (03) :253-268