Controlled formation of organic layers on semiconductor surfaces

被引:74
作者
Hovis, JS [1 ]
Lee, S [1 ]
Liu, HB [1 ]
Hamers, RJ [1 ]
机构
[1] UNIV WISCONSIN,DEPT CHEM,MADISON,WI 53706
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1997年 / 15卷 / 04期
关键词
D O I
10.1116/1.589431
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
It has been shown that well-defined, ordered organic layers can be formed on the silicon (100) surface. This is achieved through the interaction of unsaturated C=C bonds with the oriented dimers of the reconstructed Si(100)-(2 X 1) surface. In this article, we present an investigation of the structure and chemical bonding of organic films prepared using different organic precursors, Data were obtained using scanning tunneling microscopy, Fourier-transform infrared spectroscopy, and x-ray photoelectron spectroscopy. The molecules investigated are cyclopentene, 3-pyrroline, and norbornadiene, representing prototypical cyclic, heterocyclic, and bicyclic unsaturated organic molecules, respectively. Each molecule has at least one unsaturated C=C bond. (C) 1997 American Vacuum Society.
引用
收藏
页码:1153 / 1158
页数:6
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