Hall-effect characterization of III-V nitride semiconductors for high efficiency light emitting diodes

被引：143

作者：

Götz, W ^{[1
]}

Kern, RS ^{[1
]}

Chen, CH ^{[1
]}

Liu, H ^{[1
]}

Steigerwald, DA ^{[1
]}

Fletcher, RM ^{[1
]}

机构：

[1] Hewlett Packard Co, San Jose, CA 95131 USA

来源：

MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY | 1999年 / 59卷 / 1-3期

关键词：

Hall-effect; donors; acceptors; LEDs;

D O I：

10.1016/S0921-5107(98)00393-6

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Variable-temperature Hall-effect measurements were employed to optimize doping for GaN layers utilized in blue, blue-green and green light emitting diodes (LEDs). N-type doping was accomplished by doping with Si, Ge, and O, and the electronic properties of these donors were studied. Si and Ge, which substitute for Ga, are shallow donors with almost identical activation energies for ionization (ca. 17 and ca. 19 meV, respectively, for a donor concentration of ca. 3 x 10(17) cm(-3)). O substitutes for N and introduces a slightly deeper donor level into the bandgap of GaN having an activation energy of ca. 29 meV (for a donor concentration of ca. 1 x 10(18) cm(-3)). Mg doping was employed to achieve p-type conductivity for GaN device layers. Mg substitutes for Ga introducing a relatively deep acceptor level. For the analysis of the variable-temperature Hall-effect data, it was found important to take the coulomb interaction between ionized accepters into account, leading to lower activation energy with increasing degree of ionization (increasing temperature). The activation energy for ionization of Mg accepters in GaN was thus estimated to be (208 +/- 6) meV for very low acceptor concentrations. Using optimized nitride layers, LEDs with typical external quantum efficiencies of ca. 10% in the blue and blue-green, and ca. 8% in the green wavelength range were achieved. Due to optimized doping, the forward voltages for these diodes were as low as 3.2 V at 20 mA drive current. (C) 1999 Elsevier Science S.A. All rights reserved.

引用

页码：211 / 217

页数：7

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