Phase shifting by a rotating polarizer in white-light interferometry for surface profiling

被引:16
作者
Helen, SS [1 ]
Kothiyal, MP [1 ]
Sirohi, RS [1 ]
机构
[1] Indian Inst Technol, Dept Phys, Appl Opt Lab, Madras 600036, Tamil Nadu, India
关键词
D O I
10.1080/095003499149421
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
In white-light interferometry, the position of the peak of the fringe contrast function is directly related to the surface height of the object. In this paper, we present a phase-shifting technique to determine the fringe contrast function using a rotating polarizer, which introduces an achromatic phase shift. The effect of introducing the rotating polarizer phase shifter at the output of the white-light interferometer has been studied. It is shown that the peak of the fringe contrast function does not occur for zero path difference between the arms of the interferometer; it is father shifted by a constant amount. This shift, however, does not introduce any error in relative height measurements. The experimental results are presented.
引用
收藏
页码:993 / 1001
页数:9
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