Si nano-photodiode with a surface-plasmon antenna for SiON waveguide-integrated structure

被引：3

作者：

Fujikata, Junichi ^{[1
]}

Ushida, Jun ^{[1
]}

Okamoto, Daisuke ^{[1
]}

Gomyo, Akiko ^{[1
]}

Nishi, Kenichi ^{[1
]}

Tsuchizawa, Tai ^{[2
]}

Watanabe, Toshifumi ^{[2
]}

Yamada, Koji ^{[2
]}

Itabashi, Seiichi ^{[2
]}

Ohashi, Keishi ^{[1
]}

机构：

[1] MIRAI Selete, 34 Miyukigaoka, Tsukuba, Ibaraki 3058501, Japan

[2] NTT Microsyst Integrat Labs, Atsugi, Kanagawa 243 0198, Japan

来源：

2007 IEEE LEOS ANNUAL MEETING CONFERENCE PROCEEDINGS, VOLS 1 AND 2 | 2007年

关键词：

D O I：

10.1109/LEOS.2007.4382715

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We developed a Si nano-photodiode with a surface plasmon (SP) antenna for a SiON waveguide-integrated structure. We showed that interfacial periodic nano-scale metal-semiconductor-metal Schottky electrodes function as an SP optical antenna and also as an optical coupler between a SiON waveguide and a very thin Si-absorption layer.

引用

页码：929 / +

页数：2

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