Structures and properties of (Zn,Mg)O films studied from the aspect of phase equilibria

被引:45
作者
Ryoken, H
Ohashi, N
Sakaguchi, I
Adachi, Y
Hishita, S
Haneda, H
机构
[1] NIMS, Tsukuba, Ibaraki 3050044, Japan
[2] Kyushu Univ, Dept Appl Sci Elect & Mat, Fukuoka 8168580, Japan
关键词
phase equilibria; solid solutions; laser epitaxy; oxides; semiconducting II-VI materials;
D O I
10.1016/j.jcrysgro.2005.10.056
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
The structural properties of binary alloy compounds of the ZnO-MgO system have been investigated. Pulsed laser deposition (PLD) yielded single-phase films of wurtzite-type (Zn1-xMgx)O within the compositional range of x <= 0.47. After annealing, the (Zn1-xMgx)O films with x >= 0.18 decomposed into a rocksalt-type and a wurtzite-type phase, whereas the sample with x = 0.12 remained as wurtzite-type single phase. Thus, the solubility limit of this system seems to be within the range of 0.12 < x < 0.18. However, the lattice constants of the alloy film with x < 0.12 varied with annealing temperature. These behaviors indicated the highly non-equilibrium nature of (Zn,Mg)O alloy film grown by PLD. (c) 2005 Published by Elsevier B.V.
引用
收藏
页码:134 / 138
页数:5
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