Touch mode capacitive pressure sensors for industrial applications

被引：28

作者：

Ko, WH

Wang, QA

机构：

来源：

MEMS 97, PROCEEDINGS - IEEE THE TENTH ANNUAL INTERNATIONAL WORKSHOP ON MICRO ELECTRO MECHANICAL SYSTEMS: AN INVESTIGATION OF MICRO STRUCTURES, SENSORS, ACTUATORS, MACHINES AND ROBOTS | 1997年

关键词：

D O I：

10.1109/MEMSYS.1997.581828

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

The principle, simulation, design, characteristics and application of touch mode capacitive pressure sensors for industrial applications, including embedded monitoring of tire pressure are presented In touch mode operation, the diaphragm of the capacitive pressure sensor touches the substrate structure. The advantages of touch mode of operation are: near linear output, large over-range pressure and robust structure that make it capable to withstand harsh industrial field environment, When properly packaged, the device can be used to measure fluid now, force, acceleration, and displacement, etc. in industrial applications.

引用

页码：284 / 289

页数：6