Sputter synthesis of ferroelectric films and heterostructures

被引：35

作者：

Auciello, O

Kingon, AI

Krupanidhi, SB

机构：

来源：

MRS BULLETIN | 1996年 / 21卷 / 06期

关键词：

D O I：

10.1557/S0883769400046042

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

[No abstract available]

引用

页码：25 / 30

页数：6

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