DUV-E-beam mix and match lithography in a single mask for fabricating a multi-terminal SQUID device

A new kind of superconducting device has been fabricated, which is recently predicted to show tunable macroscopic quantum behaviour. As such it is a nonlinear element highly sensitive to the action of electromagnetic fields. The device is a multi-terminal SQUID (MTS), consisting of a superconducting ring interrupted by a Josephson multi-terminal junction, which in our case is a 4-terminal nanocross, 240 nm long and 40 nm wide. In this work we present the fabrication process and some preliminary measurement results.