Deposition of diamond-like carbon films by electrolysis of methanol solution

被引：123

作者：

Wang, H ^{[1
]}

Shen, MR ^{[1
]}

Ning, ZY ^{[1
]}

Ye, C ^{[1
]}

Cao, CB ^{[1
]}

Dang, HY ^{[1
]}

Zhu, HS ^{[1
]}

机构：

[1] BEIJING INST TECHNOL,RES CTR MAT SCI,BEIJING 100081,PEOPLES R CHINA

来源：

APPLIED PHYSICS LETTERS | 1996年 / 69卷 / 08期

关键词：

D O I：

10.1063/1.116935

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

By electrolysis of the methanol solution, an attempt was made to deposit diamondlike carbon (DLC) films on silicon substrate at temperature of less than 60 degrees C. Substrates were negatively biased with a dc potential of 0 to -300 V. Ir spectra showed that the O-H, C-H, and C-O vibration bands of electrolyte decreased remarkably after electrolysis and a new peak characterized as the C=C bond appeared. The deposited films were characterized as DLC films by Raman spectroscopy. (C) 1996 American Institute of Physics.

引用

页码：1074 / 1076

页数：3

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