Quantitative three-dimensional reconstruction of geometrically complex structures with nanoscale resolution

A technique to reconstruct high resolution three-dimensional structural images and chemical maps of geometrically complex features is presented. A focused ion beam microscope is used to collect secondary electron images and secondary ion mass spectroscopy elemental maps as a function of depth in the sample. These images and elemental maps are then used to reconstruct volume images and chemical maps using shape-based interpolative methods with 25 nm lateral resolution and approximately 10 nm depth resolution. From these reconstructions, fundamental parameters such as connectivity, the volume fraction, and surface areas of features of interest can be calculated directly. These techniques open broad new opportunities for understanding three-dimensional structural and chemical relationships in materials research. (C) 2002 American Institute of Physics.