Water dispersible silanes for wettability modification of polysilicon

被引：19

作者：

Almanza-Workman, AM ^{[1
]}

Raghavan, S

Deymier, P

Monk, DJ

Roop, R

机构：

[1] Univ Arizona, Dept Mat Sci & Engn, Tucson, AZ 85721 USA

[2] Motorola Inc, Sensor Prod Div, Tempe, AZ 85284 USA

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 2002年 / 149卷 / 01期

关键词：

D O I：

10.1149/1.1423645

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

The objective of this research has been to develop the chemistry and techniques for the application of hydrophobic coatings on polysilicon substrates from aqueous media with the ultimate goal of applying these techniques for preventing or reducing release as well as in use stiction in microelectromechanical structure devices. In this paper, the results obtained from a chemical system consisting of a water dispersible silane and a cationic surfactant are presented. Key experimental variables that have been investigated are the concentration of reactive silane and cationic surfactant, type of oxidation pretreatment, pH of the silane dispersion, and curing temperature. (C) 2001 The Electrochemical Society.

引用

页码：H6 / H11

页数：6

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