Cluster size dependence of the impact process on a carbon substrate

被引：37

作者：

Aoki, T ^{[1
]}

Seki, T ^{[1
]}

Matsuo, J ^{[1
]}

Insepov, Z ^{[1
]}

Yamada, I ^{[1
]}

机构：

[1] Kyoto Univ, Ion Beam Engn Expt Lab, Sakyo Ku, Kyoto 6068501, Japan

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1999年 / 153卷 / 1-4期

关键词：

D O I：

10.1016/S0168-583X(99)00201-3

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Molecular dynamics simulations of various sizes of carbon molecule as clusters impacting a carbon substrate are performed in order to examine the size-dependence of the cluster ion on the impact process. Highly Oriented Pyrolitic Graphite (HOPG) was irradiated with C-1, C-4, C-8, C-19 and C-60 clusters carrying the same energy-per-atom of 2 keV/ atom. When the cluster size is less than eight, interspersed damage is formed by the cascade-collision mechanism, whereas C-19 and C-60 impacts show homogeneously damaged regions in the surface of the substrate. In the case of large cluster ion impacts, all the incident energy of a cluster is deposited with high density in narrow region on the surface. These results show good agreement with experimental STM observations of single traces induced by the impact of C-60 and small carbon molecules. (C) 1999 Elsevier Science B.V. All rights reserved.

引用

页码：264 / 269

页数：6

共 14 条

[1] Molecular dynamics simulation of damage formation by cluster ion impact [J].

Aoki, T ;

Matsuo, J ;

Insepov, Z ;

Yamada, I .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1997, 121 (1-4) :49-52

[2]

AOKI T, 1999, MATER RES SOC SYMP P, V504, P81

[3] A MONTE-CARLO COMPUTER-PROGRAM FOR THE TRANSPORT OF ENERGETIC IONS IN AMORPHOUS TARGETS [J].

BIERSACK, JP ;

HAGGMARK, LG .

NUCLEAR INSTRUMENTS & METHODS, 1980, 174 (1-2) :257-269

[4] DEFECT CREATION IN TRACKS PRODUCED BY HIGH-ENERGY CARBON CLUSTERS IN LIF [J].

PEREZ, A ;

DOBELI, M ;

SYNAL, HA .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1994, 91 (1-4) :187-191

[5] STM observation of HOPG surfaces irradiated with Ar cluster ions [J].

Seki, T ;

Kaneko, T ;

Takeuchi, D ;

Aoki, T ;

Matsuo, J ;

Insepov, Z ;

Yamada, I .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1997, 121 (1-4) :498-502

[6]

SEKI T, 1999, MATER RES SOC S P, V524, P93

[7] Study of Ar cluster ion bombardment of a sapphire surface [J].

Takeuchi, D ;

Fukushima, K ;

Matsuo, J ;

Yamada, I .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1997, 121 (1-4) :493-497

[8] Fullerene ion irradiation to silicon [J].

Tanomura, M ;

Takeuchi, D ;

Matsuo, J ;

Takaoka, GH ;

Yamada, I .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1997, 121 (1-4) :480-483

[9] MODELING SOLID-STATE CHEMISTRY - INTERATOMIC POTENTIALS FOR MULTICOMPONENT SYSTEMS [J].

TERSOFF, J .

PHYSICAL REVIEW B, 1989, 39 (08) :5566-5568

[10] Reactive sputtering by SF6 cluster ion beams [J].

Toyoda, N ;

Kitani, H ;

Matsuo, J ;

Yamada, I .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1997, 121 (1-4) :484-488

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