Control tribological and mechanical properties of MEMS surfaces. Part 1: critical review

被引：113

作者：

Rymuza, Z ^{[1
]}

机构：

[1] Warsaw Univ Technol, Dept Mechatron, Inst Micromech & Photon, PL-02525 Warsaw, Poland

来源：

MICROSYSTEM TECHNOLOGIES | 1999年 / 5卷 / 04期

关键词：

D O I：

10.1007/s005420050160

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 [电气工程]; 0809 [电子科学与技术];

摘要：

The problem of modification of rubbing surfaces in micrometer size microdevices (micro-electro-mechanical systems - MEMS) to control adhesion, friction and wear as well as mechanical properties is discussed. Several solutions are reviewed and examples of investigation results are given.

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页码：173 / 180

页数：8

相关论文

共 62 条

[1]

EFFECTS OF ELEVATED-TEMPERATURE TREATMENTS IN MICROSTRUCTURE RELEASE PROCEDURES [J].

ABE, T ;

MESSNER, WC ;

REED, ML .

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 1995, 4 (02) :66-75

[2]

[Anonymous], 1998, TRIBOLOGY ISSUES OPP

[3]

ELECTRIC MICROMOTOR DYNAMICS [J].

BART, SF ;

MEHREGANY, M ;

TAVROW, LS ;

LANG, JH ;

SENTURIA, SD .

IEEE TRANSACTIONS ON ELECTRON DEVICES, 1992, 39 (03) :566-575

[4]

BAYER RG, 1982, WEAR, V69, P235

[5]

WEAR AT MICROSCOPIC SCALES AND LIGHT LOADS FOR MEMS APPLICATIONS [J].

BEERSCHWINGER, U ;

ALBRECHT, T ;

MATHIESON, D ;

REUBEN, RL ;

YANG, SJ ;

TAGHIZADEH, M .

WEAR, 1995, 181 :426-435

[6]

FRICTION MEASUREMENTS ON LIGA-PROCESSES MICROSTRUCTURES [J].

BEERSCHWINGER, U ;

YANG, SJ ;

REUBEN, RL ;

TAGHIZADEH, MR ;

WALLRABE, U .

JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 1994, 4 (01) :14-22

[7]

A STUDY OF WEAR ON MEMS CONTACT MORPHOLOGIES [J].

BEERSCHWINGER, U ;

MATHIESON, D ;

REUBEN, RL ;

YANG, SJ .

JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 1994, 4 (03) :95-105

[8]

BEERSCHWINGER U, 1995, THESIS H WATT U EDIN

[9]

Nanoindentation and picoindentation measurements using a capacitive transducer system in atomic force microscopy [J].

Bhushan, B ;

Kulkarni, AV ;

Bonin, W ;

Wyrobek, JT .

PHILOSOPHICAL MAGAZINE A-PHYSICS OF CONDENSED MATTER STRUCTURE DEFECTS AND MECHANICAL PROPERTIES, 1996, 74 (05) :1117-1128

[10]

THE CASE FOR MAGNETICALLY DRIVEN MICROACTUATORS [J].

BUSCHVISHNIAC, IJ .

SENSORS AND ACTUATORS A-PHYSICAL, 1992, 33 (03) :207-220

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