Microstructure of Ba0.5Sr0.5TiO3 thin films on (100)LaAlO3 with SrRuO3 as electrodes

被引：4

作者：

Jia, QX

Zhou, DS

Foltyn, SR

Wu, XD

Findikoglu, AT

Smith, JL

机构：

[1] Materials Science and Technology Division, Los Alamos National Laboratory, Los Alamos, NM, 87545

[2] Applied Materials, Santa Clara, CA, 95054, MS 0205

[3] Symyx, Sunnyvale, CA, 94086

来源：

PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES | 1997年 / 75卷 / 02期

关键词：

D O I：

10.1080/13642819708202314

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Using pulsed-laser deposition, we grew quaternary Ba0.5Sr0.5TiO3 thin films heteroepitaxially on (100) LaAlO3 substrates with conductive SrRuO3 as a bottom electrode. The microstructure of this multilayer of Ba0.5Sr0.5TiO3/SrRuO3/LaAlO3, was characterized by X-ray diffraction and cross-sectional transmission electron microscopy. The heteroepitaxial growth relationship was found to be (h00)(Ba0.5Sr0.5TiO3)parallel to(00l)(SrRuO3)parallel to(h00)(LaAlO3) and [110](Ba0.5Sr0.5TiO3)parallel to [100](SrRuO3)parallel to[110](LaAlO3). The high dielectric constant of the crystalline Ba0.5Sr0.5TiO3 thin films and the low leakage current of the Ba0.5Sr0.5TiO3 film sandwiched between a top Au and bottom SrRuO3 electrodes are attributed to the structural perfection of the films and the clean interfaces between layers.

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页码：261 / 269

页数：9

相关论文

共 17 条

[1] COMPARATIVE-STUDY OF AMORPHOUS AND CRYSTALLINE (BA, SR)TIO3 THIN-FILMS DEPOSITED BY LASER-ABLATION [J].

BHATTACHARYA, P ;

KOMEDA, T ;

PARK, K ;

NISHIOKA, Y .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1993, 32 (9B) :4103-4106

[2] ELECTRICAL PROPERTIES OF CARUO3 AND SRRUO3 SINGLE-CRYSTALS [J].

BOUCHARD, RJ ;

GILLSON, JL .

MATERIALS RESEARCH BULLETIN, 1972, 7 (09) :873-&

[3] SINGLE-CRYSTAL EPITAXIAL THIN-FILMS OF THE ISOTROPIC METALLIC OXIDES SR1-XCAXRUO3 (0-LESS-THAN-OR-EQUAL-TO-X-LESS-THAN-OR-EQUAL-TO-1) [J].

EOM, CB ;

CAVA, RJ ;

FLEMING, RM ;

PHILLIPS, JM ;

VANDOVER, RB ;

MARSHALL, JH ;

HSU, JWP ;

KRAJEWSKI, JJ ;

PECK, WF .

SCIENCE, 1992, 258 (5089) :1766-1769

[4]

FOSTER CM, 1995, MATER RES SOC SYMP P, V361, P307

[5] STRUCTURE AND PROPERTIES OF EPITAXIAL BA0.5SR0.5TIO3/SRRUO3/ZRO2 HETEROSTRUCTURE ON SI GROWN BY OFF-AXIS SPUTTERING [J].

HOU, SY ;

KWO, J ;

WATTS, RK ;

CHENG, JY ;

FORK, DK .

APPLIED PHYSICS LETTERS, 1995, 67 (10) :1387-1389

[6] PREPARATION AND PROPERTIES OF (BA, SR)TIO3 THIN-FILMS BY RF MAGNETRON SPUTTERING [J].

ICHINOSE, N ;

OGIWARA, T .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1993, 32 (9B) :4115-4117

[7] Characteristics of conductive SrRuO3 thin films with different microstructures [J].

Jia, QX ;

Chu, F ;

Adams, CD ;

Wu, XD ;

Hawley, M ;

Cho, JH ;

Findikoglu, AT ;

Foltyn, SR ;

Smith, JL ;

Mitchell, TE .

JOURNAL OF MATERIALS RESEARCH, 1996, 11 (09) :2263-2268

[8] STRUCTURAL AND ELECTRICAL-PROPERTIES OF BA0.5SR0.5TIO3 THIN-FILMS WITH CONDUCTIVE SRRUO3 BOTTOM ELECTRODES [J].

JIA, QX ;

WU, XD ;

FOLTYN, SR ;

TIWARI, P .

APPLIED PHYSICS LETTERS, 1995, 66 (17) :2197-2199

[9] Characterization of Ba0.5Sr0.5TiO3 thin film capacitors produced by pulsed laser deposition [J].

Jia, QX ;

Zhou, DS ;

Wu, XD ;

Foltyn, SR ;

Tiwari, P ;

Mitchell, TE .

INTEGRATED FERROELECTRICS, 1995, 10 (1-4) :73-79

[10] STRUCTURAL AND ELECTRICAL-PROPERTIES OF RF MAGNETRON-SPUTTERED BA1-XSRXTIO3 THIN-FILMS ON INDIUM-TIN-OXIDE-COATED GLASS SUBSTRATE [J].

KIM, TS ;

KIM, CH ;

OH, MH .

JOURNAL OF APPLIED PHYSICS, 1994, 75 (12) :7998-8003