Monitoring of nitrogen gas purity by the hot filament method

被引:2
作者
Buhlmann, HJ
Ilegems, M
机构
[1] Inst. of Micro- and Optoelectronics, Swiss Fed. Institute of Technology
关键词
D O I
10.1063/1.1148210
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
A hot filament can be used as a simple, reliable, and inexpensive sensor to measure quantitatively ppm-level concentrations of oxidizing species present in high-purity nitrogen. A coiled tungsten filament of a 1 W signal lamp acts as a sensing element, which. by high-temperature reaction with O-2 and H2O, forms volatile oxides. The resulting decrease in filament diameter and rise in filament resistance is monitored by measuring the current at constant voltage. The sensor's response is linear with the O-2 concentration over an extended range of ''burn-down'' and is relatively insensitive to the gas velocity. The reaction appears to be rate limited by the diffusion of oxygen along its concentration gradient toward the filament. The sensor's sensitivity, operated in nitrogen at U-fil=6.3 V, is determined to S=21 ppm O-2/(mA/min). (C) 1997 American Institute of Physics.
引用
收藏
页码:2871 / 2877
页数:7
相关论文
共 11 条
[1]  
Carr-Brion K., 1986, MOISTURE SENSORS PRO
[2]   ATMOSPHERIC-PRESSURE IONIZATION MASS-SPECTROMETRY [J].
CARROLL, DI ;
DZIDIC, I ;
HORNING, EC ;
STILLWELL, RN .
APPLIED SPECTROSCOPY REVIEWS, 1981, 17 (03) :337-406
[3]  
Crank J, 1979, MATH DIFFUSION
[4]   AN IMPROVED ELECTROLYTIC HYGROMETER [J].
GOLDSMITH, P ;
COX, LC .
JOURNAL OF SCIENTIFIC INSTRUMENTS, 1967, 44 (01) :29-+
[5]   A PRESSURIZED GOLDSMITH - COX HYGROMETER FOR PLANT USE AT ULTRA-LOW HUMIDITIES [J].
GRAY, PS ;
GORDON, I .
JOURNAL OF SCIENTIFIC INSTRUMENTS, 1967, 44 (01) :84-&
[6]   DETERMINATION OF WATER BY DIRECT AMPEROMETRIC MEASUREMENT [J].
KEIDEL, FA .
ANALYTICAL CHEMISTRY, 1959, 31 (12) :2043-2048
[7]   Chemical reactions at very low pressures. II. The chemical clean-up of nitrogen in a tungsten lamp. [J].
Langmuir, I .
JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1913, 35 :931-945
[8]  
MCANDREW JJ, 1992, SOLID STATE TECHNOL, V35, P55
[9]   COMPARISON OF CONTINUOUS MOISTURE MONITORS IN THE RANGE 1-PPM TO 15-PPM [J].
MEHRHOFF, TK .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1985, 56 (10) :1930-1933
[10]  
REED TB, 1967, SOLID STATE RES, V3, P27