Generation of large-volume plasma by making use of multi-needle plasma at low-pressure

被引：15

作者：

Hong, YC ^{[1
]}

Shin, DH ^{[1
]}

Lee, SC ^{[1
]}

Uhm, HS ^{[1
]}

机构：

[1] Ajou Univ, Dept Mol Sci & Technol, Suwon 443749, South Korea

来源：

THIN SOLID FILMS | 2006年 / 506卷

关键词：

large-volume plasma; multi-needle plasma; magnetic field;

D O I：

10.1016/j.tsf.2005.08.348

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The description and investigation of a large-volume plasma source at low pressure are presented in this article. This new system is a modification of large-volume plasma source operated by thermionic filaments, and is an application of multi-needle plasma at atmospheric pressure stabilized by the flowing channel of a working gas through a high-voltage electrode operated by a AC (20 kHz) power supply. The weakly magnetized plasma is created by direct ionization of the background gas by low-energy electrons generated from multi-needle plasma, which are annularly arranged at one end of a cylindrical chamber. The bulk plasma experiment is conducted in the cylindrical stainless steel chamber with a radius of 0.5 m and a length of 3 m. Also, presented are preliminary experimental results of multi-needle plasma at atmospheric pressure. (c) 2005 Elsevier B.V. All rights reserved.

引用

页码：474 / 478

页数：5

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