A flexible packaging and interconnect scheme for microfluidic systems

被引:3
作者
Benett, W [1 ]
Krulevitch, P [1 ]
机构
[1] Univ Calif Lawrence Livermore Natl Lab, Ctr MicroTechnol, Livermore, CA 94551 USA
来源
MICRO- AND NANOFABRICATED STRUCTURES AND DEVICES FOR BIOMEDICAL ENVIRONMENTAL APPLICATIONS II | 1999年 / 3606卷
关键词
microfluidics; interconnects; packaging; MEMS;
D O I
10.1117/12.350051
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
A slide-together compression package and microfluidic interconnects for microfabricated devices requiring fluidic and electrical connections is presented. The package assembles without tools, is reusable, and requires no epoxy, wirebonds, or solder, making chip replacement fast and easy. The microfluidic interconnects use standard HPLC PEEK tubing, with the tip machined to accept either an o-ring or custom molded ring which serves the dual function of forming the seal and providing mechanical retention strength. One design uses a screw to compress the o-ring, while others are simply plugged into a cartridge retained in the package. The connectors are helium leak-tight, can withstand hundreds of psi, are easy to connect and disconnect, are low dead volume, have a small footprint, and are adaptable to a broad range of microfabricated devices.
引用
收藏
页码:111 / 118
页数:8
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