Nanofabrication using self-narrowing atomic beams

被引：3

作者：

Petrashov, VT

机构：

[1] Department of Physics, Royal Holloway, University of London, Egham

[2] Inst. of Microelectronics Technology, Russian Academy of Sciences, Chernogolovka, Moscow Dist.

来源：

MICROELECTRONIC ENGINEERING | 1997年 / 35卷 / 1-4期

关键词：

D O I：

10.1016/S0167-9317(96)00192-X

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A new technique for in-vacuum 3D nanofabrication of multicomponent devices with smallest features less than 10 nm of controlled geometry is suggested and tested.

引用

页码：357 / 359

页数：3