An Integrated Micromachined Electrochemical Pump and Dosing System

In this paper a micromachined electrochemically driven pump capable of dosing precise nanoliter amounts of liquid is presented. The pump consists of a micromachined channel structure realized in silicon by reactive ion etching. On top of this structure a Pyrex 1 cover piece with noble metal electrodes was bonded. The fluid to be dispensed is stored in a meander shaped reservoir which is part of the channel structure. This meander starts in an electrolyte solution containing reservoir, on top of which two noble metal electrodes are positioned. By the electrochemical production of gas bubbles by electrolysis of water at these electrodes, liquid can be driven out of the meander. The measured volume displacements were in close agreement with theory. Pump rates as low as a few nl/s could accurately be controlled via the actuation current through the electrodes. By applying current pulses rather than a continuous current, preset amounts of fluid in the nanoliter range could be dosed successfully. Because the resulting device consists of simple channel structures and metal electrodes it can easily be integrated in miniaturized chemical analysis systems to dose reagents or calibration solutions.