Liquid deposition of hydrogenated carbon films in N,N-dimethyl formamide solution

被引:13
作者
Jiu, JT [1 ]
Cai, K [1 ]
Fu, Q [1 ]
Cao, CB [1 ]
Zhu, HS [1 ]
机构
[1] Beijing Inst Technol, Res Ctr Mat Sci, Beijing 100081, Peoples R China
基金
中国国家自然科学基金;
关键词
diamond-like film; liquid phase electrodeposition; Raman spectroscopy;
D O I
10.1016/S0167-577X(99)00104-4
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Using a pulse-modulated source, an attempt has been made to deposit diamond-like carbon films by electrodeposition in N,N-dimethyl formamide (DMF) solution. XPS showed the films mainly contain carbon. IR spectrum indicated that as-deposited films are hydrogenated carbon films, and Che hydrogen mainly bonded to sp(3) carbon. Raman spectroscopy suggested that the films contained a mixture of sp(3) and sp(2) carbon. For the first time, we obtained Raman scattering at 1337 cm(-1), which is very close to the characteristic Raman line of diamond located at 1332 cm(-1) except for the large linewidth. The electrical resistivity of the films is more than 10(10) Omega cm. (C) 1999 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:63 / 66
页数:4
相关论文
共 17 条
[1]   MODELING STUDIES OF AMORPHOUS-CARBON [J].
BEEMAN, D ;
SILVERMAN, J ;
LYNDS, R ;
ANDERSON, MR .
PHYSICAL REVIEW B, 1984, 30 (02) :870-875
[2]  
BOU P, 1991, J ELECTROCHEM SOC, V138, P2291
[3]  
Colthup N.B., 1990, INTRO IR RAMAN SPECT
[4]   USE OF RAMAN-SCATTERING TO INVESTIGATE DISORDER AND CRYSTALLITE FORMATION IN AS-DEPOSITED AND ANNEALED CARBON-FILMS [J].
DILLON, RO ;
WOOLLAM, JA ;
KATKANANT, V .
PHYSICAL REVIEW B, 1984, 29 (06) :3482-3489
[5]   BONDING IN HYDROGENATED HARD CARBON STUDIED BY OPTICAL SPECTROSCOPY [J].
DISCHLER, B ;
BUBENZER, A ;
KOIDL, P .
SOLID STATE COMMUNICATIONS, 1983, 48 (02) :105-108
[6]   Characterization of cathodically deposited carbonaceous films on a silicon substrate [J].
Kwiatek, SE ;
Desai, V ;
Moran, PJ ;
Natishan, PM .
JOURNAL OF MATERIALS SCIENCE, 1997, 32 (12) :3123-3128
[7]   SIDEBANDS IN THE LUMINESCENCE SPECTRA OF AMORPHOUS HYDROGENATED CARBON [J].
LIN, S ;
FELDMAN, BJ .
PHYSICAL REVIEW LETTERS, 1982, 48 (12) :829-831
[8]   ANALYSIS OF THE STRUCTURE OF MULTICOMPONENT CARBON-FILMS BY RESONANT RAMAN-SCATTERING [J].
MARCUS, B ;
FAYETTE, L ;
MERMOUX, M ;
ABELLO, L ;
LUCAZEAU, G .
JOURNAL OF APPLIED PHYSICS, 1994, 76 (06) :3463-3470
[9]   Some unusual features in the Raman spectrum of amorphous-carbon films obtained by pyrolysis of maleic anhydride [J].
Subramanyam, SV ;
Sayeed, A ;
Meenakshi, V ;
Bhattacharya, S ;
Cholli, A ;
Tripathi, S .
JOURNAL OF APPLIED PHYSICS, 1997, 81 (06) :2907-2909
[10]   DEPOSITION OF CARBON-FILMS BY ELECTROLYSIS OF A WATER-ETHYLENE GLYCOL SOLUTION [J].
SUZUKI, T ;
MANITA, Y ;
YAMAZAKI, T ;
WADA, S ;
NOMA, T .
JOURNAL OF MATERIALS SCIENCE, 1995, 30 (08) :2067-2069