Structural and vibrational properties of GaN

被引:76
作者
Deguchi, T [1 ]
Ichiryu, D
Toshikawa, K
Sekiguchi, K
Sota, T
Matsuo, R
Azuhata, T
Yamaguchi, M
Yagi, T
Chichibu, S
Nakamura, S
机构
[1] Waseda Univ, Dept Elect Elect & Comp Engn, Shinjuku Ku, Tokyo 1698555, Japan
[2] Rigaku Co, Xray Res Lab, Tokyo 1968666, Japan
[3] Hirosaki Univ, Fac Sci & Technol, Dept Mat Sci & Technol, Hirosaki, Aomori 0368561, Japan
[4] Hokkaido Univ, Fac Engn, Dept Appl Phys, Sapporo, Hokkaido 0608628, Japan
[5] Hokkaido Univ, Res Inst Elect Sci, Sapporo, Hokkaido 0608628, Japan
[6] Sci Univ Tokyo, Fac Sci & Technol, Chiba 2788510, Japan
[7] Nichia Chem Ind Ltd, Dept Res & Dev, Tokushima 7448601, Japan
关键词
D O I
10.1063/1.370980
中图分类号
O59 [应用物理学];
学科分类号
摘要
Structural and vibrational properties of device quality pure GaN substrate grown using a lateral epitaxial overgrowth (LEO) technique were studied using x-ray diffraction, Brillouin, Raman, and infrared spectroscopy. Lattice constants were found to be a = 3.1896 +/- 0.0002 Angstrom and c = 5.1855 +/- 0.0002 Angstrom. Comparing the results with those on GaN epilayer directly grown on sapphire substrate, it is shown that the GaN substrate is indeed of high quality, i.e., the lattice is relaxed. However the GaN substrate has a small enough but finite residual strain arising from the pileup of the lateral growth front on SiO2 masks in the course of LEO. It was also found that the elastic stiffness constants C-13 and C-44, are more sensitive to the residual strain than the optical phonon frequencies. The high frequency and static dielectric constants were found to be 5.14 and 9.04. The Born and Callen effective charges were found to be 2.56 and 0.50. (C) 1999 American Institute of Physics. [S0021-8979(99)04016-5].
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页码:1860 / 1866
页数:7
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