Characterization of granular Ag films grown by low-energy cluster beam deposition

被引：26

作者：

Bouwen, W ^{[1
]}

Kunnen, E ^{[1
]}

Temst, K ^{[1
]}

Thoen, P ^{[1
]}

Van Bael, MJ ^{[1
]}

Vanhoutte, F ^{[1
]}

Weidele, H ^{[1
]}

Lievens, P ^{[1
]}

Silverans, RE ^{[1
]}

机构：

[1] Katholieke Univ Leuven, Lab Vaste Stoffys & Magnetisme, B-3001 Louvain, Belgium

来源：

THIN SOLID FILMS | 1999年 / 354卷 / 1-2期

关键词：

clusters; silver; low-energy cluster beam deposition;

D O I：

10.1016/S0040-6090(99)00571-4

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Free charged and neutral Ag-n clusters were produced by a laser vaporization cluster source and deposited onto SiO2 substrates resulting in cluster films. These films were characterized by atomic force microscopy, X-ray diffraction and resistivity measurements to determine film topography, grain sizes, dimensions of the coherent scattering regions perpendicular to the film plane, and the mean free path length of the conduction electrons. An Ag film grown by molecular beam deposition was investigated using the same characterization techniques. The results show that the deposited clusters keep at least part of their shape upon impact on the substrate, giving rise to growth patterns and film properties distinctly different from those of conventionally grown films. (C) 1999 Elsevier Science S.A. All rights reserved.

引用

页码：87 / 92

页数：6

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