Characterization of polydimethylsiloxane (PDMS) properties for biomedical micro/nanosystems

被引:1038
作者
Mata, A
Fleischman, AJ
Roy, S
机构
[1] Cleveland Clin Fdn, Dept Biomed Engn, BioMEMS Lab, Lerner Res Inst, Cleveland, OH 44120 USA
[2] Cleveland State Univ, Dept Chem & Biomed Engn, Cleveland, OH 44115 USA
关键词
polydimethylsiloxane; PDMS; poly(dimethylsiloxane); mechanical properties; micromachining; microfabrication; MEMS; microsystems; contact angle; sterilization; tensile strength; structural properties; nanotechnology; nanosystems;
D O I
10.1007/s10544-005-6070-2
中图分类号
R318 [生物医学工程];
学科分类号
0831 ;
摘要
Polydimethylsiloxane (PDMS Sylgard(R) 184, Dow Corning Corporation) pre-polymer was combined with increasing amounts of cross-linker (5.7, 10.0, 14.3, 21.4, and 42.9 wt.%) and designated PDMS1, PDMS2, PDMS3, PDMS4, and PDMS5, respectively. These materials were processed by spin coating and subjected to common. microfabrication, micromachining, and biomedical processes: chemical immersion, oxygen plasma treatment, sterilization, and exposure to tissue culture media. The PDMS formulations were analyzed by gravimetry, goniometry, tensile testing, nanoindentation, scanning electron microscopy (SEM), Fourier transform infrared spectroscopy (FTIR), and X-ray photoelectron spectroscopy (XPS). Spin coating of PDMS was formulation dependent with film thickness ranging from 308 mu m on PDMS1 to 171 mu m on PDMS5 at 200 revolutions per minute (rpm). Ultimate tensile stress (UTS) increased from 3.9 MPa (PDMS1) to 10.8 MPa (PDMS3), and then decreased down to 4.0 MPa (PDMS5). Autoclave sterilization (AS) increased the storage modulus (sigma) and UTS in all formulations, with the highest increase in UTS exhibited by PDMS5 (218%). PDMS surface hydrophilicity and micro-textures were generally unaffected when exposed to the different chemicals, except for micro-texture changes after immersion in potassium hydroxide and buffered hydrofluoric, nitric, sulfuric, and hydrofluoric acids; and minimal changes in contact angle after immersion in hexane, hydrochloric acid, photoresist developer, and toluene. Oxygen plasma treatment decreased the contact angle of PDMS2 from 109 degrees to 60 degrees. Exposure to tissue culture media resulted in increased PDMS surface element concentrations of nitrogen and oxygen.
引用
收藏
页码:281 / 293
页数:13
相关论文
共 61 条
[1]   Re-configurable fluid circuits by PDMS elastomer micromachining [J].
Armani, D ;
Liu, C ;
Aluru, N .
MEMS '99: TWELFTH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 1999, :222-227
[2]   BioMEMS: state-of-the-art in detection, opportunities and prospects [J].
Bashir, R .
ADVANCED DRUG DELIVERY REVIEWS, 2004, 56 (11) :1565-1586
[3]   UV/ozone modification of poly(dimethylsiloxane) microfluidic channels [J].
Berdichevsky, Y ;
Khandurina, J ;
Guttman, A ;
Lo, YH .
SENSORS AND ACTUATORS B-CHEMICAL, 2004, 97 (2-3) :402-408
[4]   Microfabrication technology for vascularized tissue engineering [J].
Borenstein, JT ;
Terai, H ;
King, KR ;
Weinberg, EJ ;
Kaazempur-Mofrad, MR ;
Vacanti, JP .
BIOMEDICAL MICRODEVICES, 2002, 4 (03) :167-175
[5]   Low-cast PDMS seal ring for single-side wet etching of MEMS structures [J].
Brugger, J ;
Beljakovic, G ;
Despont, M ;
Biebuyck, H ;
de Rooij, NF ;
Vettiger, P .
SENSORS AND ACTUATORS A-PHYSICAL, 1998, 70 (1-2) :191-194
[6]   Development of MEMS-based cerebrospinal fluid shunt system [J].
Chung, S ;
Kim, JK ;
Wang, KC ;
Han, DC ;
Chang, JK .
BIOMEDICAL MICRODEVICES, 2003, 5 (04) :311-321
[7]   Prototyping of masks, masters, and stamps/molds for soft lithography using an office printer and photographic reduction [J].
Deng, T ;
Wu, HK ;
Brittain, ST ;
Whitesides, GM .
ANALYTICAL CHEMISTRY, 2000, 72 (14) :3176-3180
[8]   Micro- and nanoscale structures for tissue engineering constructs [J].
Desai, TA .
MEDICAL ENGINEERING & PHYSICS, 2000, 22 (09) :595-606
[9]   Injection molding of polymeric LIGA HARMs [J].
Despa, MS ;
Kelly, KW ;
Collier, JR .
MICROSYSTEM TECHNOLOGIES, 1999, 6 (02) :60-66
[10]  
*DOW CORN CORP, SYLGARD 184 SILICONE