A novel interferometer for dimensional measurement of a silicon sphere

被引:33
作者
Nicolaus, RA
Bonsch, G
机构
[1] Physikalisch-Technische Bundesanstalt
关键词
avogadro; density measurement; phase-shifting interferometry; single-crystal silicon; size measurement; sphere;
D O I
10.1109/19.571915
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In order to accurately determine Avogadro's constant, N-A, the volume of a nearly perfect single-crystal silicon sphere of I kg mass and about 90 mm diameter is to be measured with a relative uncertainty less than 10(-7). For this purpose, a new spherical Fizeau interferometer that allows the interference pattern to be evaluated by phase-stepping interferometry has been developed. This technique is based on a special algorithm for Fizeau interferences and requires four phase steps of one quarter of an interference order, which are achieved by changing the air pressure inside the environmental chamber, Uncertainties in the sub-nanometer range can be obtained by this interferometric method, The interferometer's field of view covers an angle of about 60 degrees imaged onto an electronic camera with about 16000 pixels, so that the variation of the diameter is measured with high angular resolution, For the measurements, the sphere rests on a three-point support, The sphere can be lifted and rotated around two perpendicular axes by means of a motor-driven manipulation device, so that it can be positioned in well-defined orientations.
引用
收藏
页码:563 / 565
页数:3
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