Simulation of light scattering from a particle upon a wafer surface

被引：29

作者：

Eremin, Y

Orlov, N

机构：

[1] Department of Applied Mathematics and Computer Science, Moscow State University, Moscow, 119899, Vorobyov Hills

来源：

APPLIED OPTICS | 1996年 / 35卷 / 33期

关键词：

light scattering; particle on a substrate; Maxwell equations; numerical solution;

D O I：

10.1364/AO.35.006599

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We simulated light scattering from a particle located on a smooth surface. We developed a new approach utilizing the discrete sources method based on a strict mathematical model for this scattering problem. The main features of the corresponding numerical algorithm are presented. The results of modeling and comparisons with other theoretical results and experimental data are shown as well. (C) 1996 Optical Society of America

引用

页码：6599 / 6604

页数：6

共 9 条

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