Thickness effects on microwave properties of (Ba,Sr)TiO3 films for frequency agile technologies

被引：19

作者：

Kageyama, K. ^{[1
]}

Sakurai, A. ^{[1
]}

Ando, A. ^{[1
]}

Sakabe, Y. ^{[1
]}

机构：

[1] Murata Mfg Co Ltd, Nagaokakyo, Japan

来源：

JOURNAL OF THE EUROPEAN CERAMIC SOCIETY | 2006年 / 26卷 / 10-11期

关键词：

precursors-organic; dielectric properties; perovskite;

D O I：

10.1016/j.jeurceramsoc.2005.09.090

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

We fabricated (Ba0.6Sr0.4)TiO3 (BST) thin films of various thicknesses on sapphire (-1120) substrates using metal-organic decomposition method. These films showed grain growth from 160 to 650 nm with an increase in the thickness from 90 to 1050 nm. At microwave frequencies, the measured capacitances of the planar capacitors decreased with the film thickness because the electro-magnetic field propagates across high permittivity BST films to the low permittivity sapphire substrate. However, we found that the BST-thin film permittivity remained large up to 90 nm thick, based on electro-magnetic field analysis using the finite element method. On the other hand, the BST thin film tunability decreased with the film thickness. (c) 2005 Elsevier Ltd. All rights reserved.

引用

页码：1873 / 1877

页数：5

共 7 条

[1] FAST, ACCURATE AND SIMPLE APPROXIMATE ANALYTIC FORMULAS FOR CALCULATING THE PARAMETERS OF SUPPORTED COPLANAR WAVE-GUIDES FOR (M)MICS [J].