Fabrication of glass lenses by melting technology

被引：3

作者：

Kley, EB ^{[1
]}

Fuchs, HJ ^{[1
]}

Kilian, A ^{[1
]}

机构：

[1] Univ Jena, Inst Appl Phys, D-07749 Jena, Germany

来源：

LITHOGRAPHIC AND MICROMACHINING TECHNIQUES FOR OPTICAL COMPONENT FABRICATION | 2001年 / 4440卷

关键词：

micro optics; micro lenses; micro lens arrays;

D O I：

10.1117/12.448027

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

The paper shows a fabrication technology for glass micro lenses. It starts with the fabrication of a boron phosphorus silicate glass (BPSG) layer on a quartz substrate. Pre-forms of BPSG are fabricated using photolithography and dry etching. After that, temper process at a temperature in between the melting temperature of each material changes the surface to the minimal surface. Spherical, cylindrical and even ball lenses are profiles which can be realized. Spherical, cylindrical, and ball lens profiles that can be produced.

引用

页码：85 / 92

页数：8

共 9 条

[1] THE MANUFACTURE OF MICROLENSES BY MELTING PHOTORESIST [J].

DALY, D ;

STEVENS, RF ;

HUTLEY, MC ;

DAVIES, N .

MEASUREMENT SCIENCE AND TECHNOLOGY, 1990, 1 (08) :759-766

[2] Technique for monolithic fabrication of silicon microlenses with selectable rim angles [J].

Erdmann, L ;

Efferenn, D .

OPTICAL ENGINEERING, 1997, 36 (04) :1094-1098

[3]

HYDE JF, PN2272342

[4]

KANAMORI H, 1997, PN 5693116 PROCESS P

[5]

KANAMORI H, 1993, PN 5179614 QUARTZ OP

[6]

KILIAN A, 1998, PN 5800860 METHOD MA

[7]

NUSSBAUM P, 1995, SPIE, V2783, pS55

[8] TECHNIQUE FOR MONOLITHIC FABRICATION OF MICROLENS ARRAYS [J].

POPOVIC, ZD ;

SPRAGUE, RA ;

CONNELL, GAN .

APPLIED OPTICS, 1988, 27 (07) :1281-1284

[9]

WITTIG LC, 1999, SPIE, V3879

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