CuO/ZnO Nanocomposite Gas Sensors Developed by a Plasma-Assisted Route

被引：53

作者：

Simon, Quentin

Barreca, Davide ^{[1
,2
]}

Gasparotto, Alberto

Maccato, Chiara

Tondello, Eugenio

Sada, Cinzia ^{[3
,4
]}

Comini, Elisabetta ^{[5
,7
]}

Sberveglieri, Giorgio ^{[5
,7
]}

Banerjee, Manish ^{[6
]}

Xu, Ke ^{[6
]}

Devi, Anjana ^{[6
]}

Fischer, Roland A. ^{[6
]}

机构：

[1] Univ Padua, CNR ISTM, I-35131 Padua, Italy

[2] Univ Padua, Dept Chem, INSTM, I-35131 Padua, Italy

[3] Univ Padua, Dept Phys, I-35131 Padua, Italy

[4] Univ Padua, CNISM, I-35131 Padua, Italy

[5] Univ Brescia, Dept Chem & Phys, SENSOR Lab, I-25133 Brescia, Italy

[6] Ruhr Univ Bochum, Lehrstuhl Anorgan Chem 2, D-44780 Bochum, Germany

[7] CNR IDASC, I-25133 Brescia, Italy

来源：

CHEMPHYSCHEM | 2012年 / 13卷 / 09期

关键词：

copper sputtering; CuO; gas sensors; chemical vapor deposition; ZnO; CHEMICAL-VAPOR-DEPOSITION; SENSING PROPERTIES; THIN-FILMS; GROWTH-MECHANISM; CO GAS; P-TYPE; ZNO; OXIDE; SELECTIVITY; NANOWIRES;

D O I：

10.1002/cphc.201101062

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

CuO/ZnO nanocomposites were synthesized on Al2O3 substrates by a hybrid plasma-assisted approach, combining the initial growth of ZnO columnar arrays by plasma-enhanced chemical vapor deposition (PE-CVD) and subsequent radio frequency (RF) sputtering of copper, followed by final annealing in air. Chemical, morphological, and structural analyses revealed the formation of high-purity nanosystems, characterized by a controllable dispersion of CuO particles into ZnO matrices. The high surface-to-volume ratio of the obtained materials, along with intimate CuO/ZnO intermixing, resulted in the efficient detection of various oxidizing and reducing gases (such as O3, CH3CH2OH, and H2). The obtained data are critically discussed and interrelated with the chemical and physical properties of the nanocomposites.

引用

页码：2342 / 2348

页数：7

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