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Physically based predictive model of oxide charging
被引：2
作者：
Conley, JF
Lenahan, L
Wallace, BD
机构：
来源：
1996 INTERNATIONAL INTEGRATED RELIABILITY WORKSHOP FINAL REPORT
|
1996年
关键词：
D O I：
10.1109/IRWS.1996.583398
中图分类号：
TM [电工技术];
TN [电子技术、通信技术];
学科分类号：
0808 ;
0809 ;
摘要：
A combination of statistical thermodynamics and electron spin resonance (ESR) measurements of defects known as E' centers is used to develop a physically based predictive model of oxide charging. If is found that this model is in excellent agreement with experimental data.
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页码：134 / 141
页数：8
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