Doping effect of SnO2 on gas sensing characteristics of sputtered ZnO thin film chemical sensor

被引：27

作者：

Nanto, H

Morita, T

Habara, H

Kondo, K

Douguchi, Y

Minami, T

机构：

[1] KANAZAWA INST TECHNOL,ADV MAT SCI RES & DEV CTR,NONOICHI,ISHIKAWA 921,JAPAN

[2] IND RES INST ISHIKAWA,KANAZAWA,ISHIKAWA 92002,JAPAN

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 1996年 / 36卷 / 1-3期

关键词：

doping effect; SnO2; gas sensor; sputtered ZnO thin film chemical sensor;

D O I：

10.1016/S0925-4005(97)80101-3

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

The SnO2 content dependence of the sensitivity of sputtered SnO2-doped ZnO thin film chemical sensor is studied for various gases. It is found that the SnO2(78 wt%)-doped ZnO thin film chemical sensor exhibits a high sensitivity and good selectivity for C2H5OH gas. The sensitivity of the SnO2(78 wt%)-doped ZnO thin film chemical sensor responds to the freshness change of alcohols, indicating that the sensor is useful for freshness detection of alcohols.

引用

页码：384 / 387

页数：4

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