Characterization of HKUST-1 Crystals and Their Application to MEMS Microcantilever array Sensors

被引：13

作者：

Venkatasubramanian, Anandram ^{[1
]}

Lee, Jin-Hwan ^{[1
]}

Houk, Ronald J. T. ^{[2
]}

Allendorf, Mark D. ^{[2
]}

Nair, Sankar ^{[1
]}

Hesketh, Peter J. ^{[1
]}

机构：

[1] Georgia Inst Technol, George W Woodruff Sch Mech Engn, Atlanta, GA 30332 USA

[2] Sandia Natl Labs, Livermore, CA 94551 USA

来源：

CHEMICAL SENSORS 9 -AND- MEMS/NEMS 9 | 2010年 / 33卷 / 08期

关键词：

METAL-ORGANIC FRAMEWORKS;

D O I：

10.1149/1.3484126

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

In this paper, thermodynamic characterization of the well known MOF HKUST-1 has been conducted using Quartz Crystal Microbalance (QCM) with the analyte gas CO2 for a wide range of temperatures and pressures. The thermal characterization of HKUST-1 was performed by measuring the shift in resonant frequency of the crystal, to calculate the adsorption isotherms. The adsorption isotherms were then fit to Langmuir isotherms to obtain the thermodynamic parameters. HKUST-1 was then successfully applied to microcantilever for sensor application. N-doped piezoresistive microcantilever array sensors were fabricated using microfabrication technologies. The substantial resistance changes with MOFs exhibited a strong and completely reversible response for adsorption and desorption.

引用

页码：229 / 238

页数：10

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