Optical and electrical properties of lanthanum-modified lead titanate thin films with various lanthanum concentrations

被引:19
作者
Kang, SJ
Yoon, YS
机构
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1997年 / 36卷 / 7A期
关键词
PLT; ferroelectric; paraelectric; transmission spectrum; sol-gel;
D O I
10.1143/JJAP.36.4459
中图分类号
O59 [应用物理学];
学科分类号
摘要
We have studied the effects of La concentration on the optical, dielectric and ferroelectric properties of lead lanthanum titanate (PLT) thin films using the sol-gel method. Most of the properties are greatly affected by the La concentration. The refractive index at lambda = 632.8 nm increases from 2.39 to 2.44 as the La concentration increases from 15 to 33 mol%, whereas the extinction coefficient is independent of the La concentration. The dielectric constants of the films varied from 340 to 870 with varying La concentration in the range from 15 to 33 mol%. The hysteresis loop becomes narrower with the increase of La. concentration from 15 to 28 mol% and slightly wider again with the increase of La concentration from 28 to 33 mol%. Among the films investigated in this research, PLT(28) thin him shows the best dielectric properties for application to the dielectrics of ULSI dynamic random access memories (DRAMs). At the frequency of 100 Hz, the dielectric constant and the loss tangent of PLT(28) thin film are 940 and 0.08, respectively. The leakage current density at 1.5 x 10(5) V/cm is 1 x 10(-6) A/cm(2). The comparison between the simulated and the experimental curves for the switching transient characteristics shows that PLT(28) thin film behaves like a normal dielectric.
引用
收藏
页码:4459 / 4465
页数:7
相关论文
共 31 条
[1]  
BERLINCOURT D, 1958, SC4203TR US DEP COMM
[2]  
BOULTON JM, 1994, INTEGR FERROELECTR, V4, P231
[3]   CUBIC PARAELECTRIC (NONFERROELECTRIC) PEROVSKITE PLT THIN-FILMS WITH HIGH PERMITTIVITY FOR ULSI DRAMS AND DECOUPLING CAPACITORS [J].
DEY, SK ;
LEE, JJ .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1992, 39 (07) :1607-1613
[4]   PROCESSING AND PARAMETERS OF SOL-GEL PZT THIN-FILMS FOR GAAS MEMORY APPLICATIONS [J].
DEY, SK ;
ZULEEG, R .
FERROELECTRICS, 1990, 112 :309-319
[5]   AN EXPERIMENTAL 512-BIT NONVOLATILE MEMORY WITH FERROELECTRIC STORAGE CELL [J].
EVANS, JT ;
WOMACK, R .
IEEE JOURNAL OF SOLID-STATE CIRCUITS, 1988, 23 (05) :1171-1175
[6]  
HAERTLING KH, 1976, FERROELECTRICS, V12, P9
[7]   The Distribution of Vacancies in Lanthana-Doped Lead Titanate [J].
Hennings, D. ;
Haerdtl, K. H. .
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 1970, 3 (02) :465-474
[8]   RANGE OF EXISTENCE OF PEROVSKITE PHASES IN SYSTEM PBO - TIO2 - LA2O3 [J].
HENNINGS, D .
MATERIALS RESEARCH BULLETIN, 1971, 6 (05) :329-&
[9]   EPITAXIAL-GROWTH AND THE CRYSTALLOGRAPHIC, DIELECTRIC, AND PYROELECTRIC PROPERTIES OF LANTHANUM-MODIFIED LEAD TITANATE THIN-FILMS [J].
IIJIMA, K ;
TAKAYAMA, R ;
TOMITA, Y ;
UEDA, I .
JOURNAL OF APPLIED PHYSICS, 1986, 60 (08) :2914-2919
[10]   ANOMALOUS DIELECTRIC BEHAVIOR OF LA(III) SUBSTITUTED LEAD TITANATE CERAMICS [J].
KEIZER, K ;
LANSINK, GJ ;
BURGGRAAF, AJ .
JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS, 1978, 39 (01) :59-63