Metal oxide sensors

被引:288
作者
Meixner, H
Lampe, U
机构
[1] Siemens AG, Corporate Research and Development
[2] Siemens AG, Munich
[3] Dept. of Semiconductor Technology, Technical University Hamburg, Harburg
关键词
gas sensors; metal oxides; sensitivity; cross sensitivity; long term stability;
D O I
10.1016/0925-4005(96)80098-0
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
New gas sensors based on novel semiconducting metal oxides are developed. In comparison to the sensors based on SnO2 their properties are improved in several items. The main improvements are the lower influence of humidity, the long-term stability, the ability to start measurement immediately after switch on and reduced unit spread. The sensors will be marketed within this year.
引用
收藏
页码:198 / 202
页数:5
相关论文
共 10 条