The measurement of minimotors and micromotors torque-characteristic using miniaturized cable brake

被引：10

作者：

Brenner, W

Haddad, G

Detter, H

Popovic, G

Vujanic, A

Delic, N

机构：

[1] Institute for Precision Engineering, Technical University of Vienna, A-1040-Vienna

来源：

MICROSYSTEM TECHNOLOGIES | 1997年 / 3卷 / 02期

关键词：

Torque; Production Process; Design Principle; Technical Data; Torque Sensor;

D O I：

10.1007/s005420050058

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A miniaturized torque sensor based on cable brake principle for the measurement of torque-characteristic of minimotors and micromotors has been developed. The first generation torque sensor enables the measurement of torque of minimotors in the range of mu Nm. Design principles and the production process are described. Experimental results show fair conformity with technical data for minimotors.

引用

页码：68 / 71

页数：4

共 12 条

[1]

BENECKE W, 1994, P 4 INT C NEW ACT BR, P19

[2] IC-PROCESSED ELECTROSTATIC MICROMOTORS [J].

FAN, LS ;

TAI, YC ;

MULLER, RS .

SENSORS AND ACTUATORS, 1989, 20 (1-2) :41-47

[3]

Guckel H., 1991, Journal of Micromechanics and Microengineering, V1, P135, DOI 10.1088/0960-1317/1/3/001

[4]

HAINEL F, 1994, SEM HANDLING ASSEMBL, P113

[5]

JANOCHA H, 1992, AKTOREN GRUNDLAGEN A, P293

[6]

JUFER M, 1994, P 4 INT C NEW ACT BR, P390

[7]

KRAUSE W, 1993, KONSTRUKTIONSELEMENT, P310

[8] A STUDY OF 3 MICROFABRICATED VARIABLE-CAPACITANCE MOTORS [J].

MEHREGANY, M ;

BART, SF ;

TAVROW, LS ;

LANG, JH ;

SENTURIA, SD ;

SCHLECHT, MF .

SENSORS AND ACTUATORS A-PHYSICAL, 1990, 21 (1-3) :173-179

[9]

Moroney R. M., 1990, Proceedings. IEEE Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots (Cat. No.90CH2832-4), P182, DOI 10.1109/MEMSYS.1990.110273

[10] FABRICATION AND CHARACTERIZATION OF PZT THIN-FILM VIBRATORS FOR MICROMOTORS [J].

MURALT, P ;

KOHLI, M ;

MAEDER, T ;

KHOLKIN, A ;

BROOKS, K ;

SETTER, N ;

LUTHIER, R .

SENSORS AND ACTUATORS A-PHYSICAL, 1995, 48 (02) :157-165

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