Design and modeling of a MEMS pico-Newton loading/sensing device

被引：26

作者：

Samuel, BA ^{[1
]}

Desai, AV ^{[1
]}

Haque, MA ^{[1
]}

机构：

[1] Penn State Univ, Dept Mech & Nucl Engn, University Pk, PA 16802 USA

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2006年 / 127卷 / 01期

基金：

美国国家科学基金会;

关键词：

micro-electro-mechanical systems (MEMS) force sensor; post buckling phenomenon; non-linear stiffness; displacement amplification; compliant mechanism;

D O I：

10.1016/j.sna.2005.11.018

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper we present a novel MEMS force sensor that exploits the post-buckling phenomenon of slender silicon columns. The design philosophy and fabrication process is discussed and analytical expressions for the force-displacement characteristics are developed. The sensor can be used to perform quantitative and qualitative measurements in-situ in SEM, TEM or STM, where the small chamber size makes it challenging to integrate conventional force-displacement sensors. Potential applications for the sensor are characterization of carbon nanotube-polymer interfaces, nanoscale thin film testing and mechanical testing of single biological cells. (c) 2005 Elsevier B.V. All rights reserved.

引用

页码：155 / 162

页数：8

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