Amorphous nitrogen containing carbon films deposited by plasma assisted chemical vapour deposition

被引：16

作者：

Arora, MK ^{[1
]}

Lettington, AH ^{[1
]}

Waterman, DR ^{[1
]}

机构：

[1] Univ Reading, JJ Thomson Phys Lab, Reading RG6 2AF, Berks, England

来源：

关键词：

diamond like carbon; nitrogen carbon; optical coatings;

D O I：

10.1016/S0925-9635(98)00407-5

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Nitrogen containing carbon films have been deposited by plasma assisted chemical vapour deposition (PACVD) using nitrogen and ammonia as the nitrogen containing precursor gases. The amount of nitrogen incorporated within the films increased with the partial pressure of the precursor gas. This was coupled with a reduction in the deposition rate and the internal stress of the films together with a small decrease in hardness. Coatings on optical fibre sensors showed improved hermeticity with increasing nitrogen content and their stability in a variety of thermal environments has been evaluated. (C) 1999 Elsevier Science S.A. All rights reserved.

引用

页码：623 / 627

页数：5

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