Emission microscope observation of FEAs

被引：5

作者：

Nakane, H ^{[1
]}

Yamane, K ^{[1
]}

Muto, Y ^{[1
]}

Kawata, S ^{[1
]}

Adachi, H ^{[1
]}

机构：

[1] Muroran Inst Technol, Dept Elect & Elect Engn, Muroran, Hokkaido 0508585, Japan

来源：

APPLIED SURFACE SCIENCE | 1999年 / 146卷 / 1-4期

关键词：

FEA; emission microscope;

D O I：

10.1016/S0169-4332(99)00034-3

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Electron emission from a FEA was magnified by making use of an emission microscope, and the uniformity of the electron emission was examined. By resolving the electron emission from the each microtip, the stability of electron emission from a single microtip was successfully measured. Magnification factors of 100 and spatial resolution of 6 mu m are achieved. The uniformity of the electron emission from the microtips depends on the uniformity of microtip apex size. It also depends on the uniformity of geometrical arrangement of the gate electrode and microtip. The emission stabilities of individual microtips are different and the emitted electron current fluctuates like pulses. (C) 1999 Elsevier Science B.V. All rights reserved.

引用

页码：169 / 171

页数：3