A proportional microvalve using a Bi-stable magnetic actuator

被引：39

作者：

Shinozawa, Y

Abe, T

Kondo, T

机构：

来源：

MEMS 97, PROCEEDINGS - IEEE THE TENTH ANNUAL INTERNATIONAL WORKSHOP ON MICRO ELECTRO MECHANICAL SYSTEMS: AN INVESTIGATION OF MICRO STRUCTURES, SENSORS, ACTUATORS, MACHINES AND ROBOTS | 1997年

关键词：

D O I：

10.1109/MEMSYS.1997.581809

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

A simple electromagnetic miniature valve was fabricated using a combination of a micromachined coil and a permanent magnet. The dimension of the valve including the actuator is about 5x5x5 mm, and the valve has a 0.5 mm valve cap displacement which significantly alleviates the clogging problem by using a bi-stable actuation of the magnet. The smallest controllable amount of water was 0.7 mu 1/min, and flow rates through the valve less than 900 mu 1/min can be continuously adjusted by a duty ratio control of driving current to the micro coil.

引用

页码：233 / 237

页数：5