Laser ablation of dielectrics with temporally shaped femtosecond pulses

被引：174

作者：

Stoian, R ^{[2
]}

Boyle, M

Thoss, A

Rosenfeld, A

Korn, G

Hertel, IV

Campbell, EEB

机构：

[1] Natl Inst Laser Plasma & Radiat Phys, Bucharest 76900, Romania

[2] Max Born Inst Nichtlineare Opt & Kurzzeitspektros, D-12489 Berlin, Germany

[3] Gothenburg Univ, Dept Expt Phys, S-41296 Gothenburg, Sweden

[4] Chalmers Univ Technol, S-41296 Gothenburg, Sweden

来源：

APPLIED PHYSICS LETTERS | 2002年 / 80卷 / 03期

关键词：

D O I：

10.1063/1.1432747

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A significant improvement in the quality of ultrafast laser microstructuring of dielectrics is demonstrated by using temporally shaped pulse trains with subpicosecond separation. The sequential energy delivery induces a material softening during the initial steps of excitation changing the energy coupling for the subsequent steps. This leads to lower stress, cleaner structures, and provides a material-dependent optimization process. (C) 2002 American Institute of Physics.

引用

页码：353 / 355

页数：3

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