Elastic constants of tetrahedral amorphous carbon films by surface Brillouin scattering

被引：174

作者：

Ferrari, AC ^{[1
]}

Robertson, J

Beghi, MG

Bottani, CE

Ferulano, R

Pastorelli, R

机构：

[1] Univ Cambridge, Dept Engn, Cambridge CB2 1PZ, England

[2] Politecn Milan, Dipartimento Ingn Nucl, I-20133 Milan, Italy

来源：

APPLIED PHYSICS LETTERS | 1999年 / 75卷 / 13期

关键词：

D O I：

10.1063/1.124863

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The elastic constants of tetrahedral amorphous carbon (ta-C) and hydrogenated tetrahedral amorphous carbon (ta-C:H) thin films were determined nondestructively by surface Brillouin scattering. Besides the usual Rayleigh surface mode, we also observe a new pseudosurface acoustic mode of longitudinal polarization, which is a modified version of the longitudinal guided mode usually found in slow-on-fast supported films. The Young's modulus E of a ta-C with 88% sp(3) is 757 GPa, and the shear modulus G is 337 GPa. The moduli of ta-C:H with 70% sp(3) and 30 at. % H are lower, E = 300 GPa and G = 115 GPa. (C) 1999 American Institute of Physics. [S0003-6951(99)02538-3].

引用

页码：1893 / 1895

页数：3

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