Stacked two dimensional micro-lens scanner for Micro Confocal Imaging array

被引：41

作者：

Kwon, SH ^{[1
]}

Lee, LP ^{[1
]}

机构：

[1] Univ Calif Berkeley, Dept Bioengn, Berkeley Sensor & Actuator Ctr, Berkeley, CA 94720 USA

来源：

FIFTEENTH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST | 2002年

关键词：

microlens; Confocal microscope; scanning; MEMS; resonator; lab-on-a-chip;

D O I：

10.1109/MEMSYS.2002.984307

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The concept of Micro Confocal Imaging array is proposed and a stacked two-dimensional microlens scanner has been developed. The 2D raster scanner consists of two ID scanners fabricated in silicon on insulator wafers stacked perpendicularly. Each scanner has a biconvex surface tension induced polymer microlens. Line scanning ranging 75mum at 4.5kHz and 2D raster scanning over an area of 40mum x 40mum are demonstrated at the focal point of the lens, which is equivalent to a maximum of 11degrees beam steering.

引用

页码：483 / 486

页数：4