Proton transport and microstructure properties in superlattice thin films fabricated by pulsed laser deposition

Superlattice thin films of the perovskite-type oxide proton conductor SrZr0.95Y0.05O3/SrTiO3 was fabricated by pulsed laser deposition. Their structural and proton transport properties were reported. X-ray diffraction analysis and selected area electron diffraction revealed that the thin films were epitaxially grown on MgO(001) substrate. High-density edge dislocations and a columnar structure were observed in the films by high-resolution electron microscopy. The in-plane electrical conductivity of the thin films was determined by impedance spectroscopy. The contribution of proton transport to the total conductivity of the films was confirmed by H2O/D2O exchange measurement. The conductivity of superlattice films was increased by introducing heterointerfaces. The high activation energy (E-a = 1.0eV) was explained by the grain-boundary effect of the columnar structure in the films.