Field emission from well-aligned carbon nanotips grown in a gated device structure

被引:17
作者
Tsai, CL [1 ]
Chen, CF [1 ]
Lin, CL [1 ]
机构
[1] Natl Chiao Tung Univ, Dept Mat Sci & Engn, Hsinchu 30050, Taiwan
关键词
D O I
10.1063/1.1459109
中图分类号
O59 [应用物理学];
学科分类号
摘要
Vertically well-aligned, high-aspect-ratio carbon nanotips have been directly grown upward on the gated device structure with 4 mum gate aperture. The nanotips rapidly nucleate and grow without any catalyst. In addition, selected area deposition of nanotips is achieved by using a Pt layer as inhibitor in the bias-assisted microwave plasma chemical vapor deposition. The field emission current of nanotips on the gated structure is 154 muA (at a gate-to-cathode voltage of V-gc=50 V). This results from the following reasons: (i) short gate-tips spacing, (ii) small gate aperture, and (iii) the high-aspect ratio of nanotips. (C) 2002 American Institute of Physics.
引用
收藏
页码:1821 / 1822
页数:2
相关论文
共 10 条
[1]   EFFECTS OF OXYGEN ON DIAMOND GROWTH USING PLATINUM SUBSTRATES [J].
BELTON, DN ;
SCHMIEG, SJ .
JOURNAL OF APPLIED PHYSICS, 1991, 69 (05) :3032-3036
[2]   Emission current influence of gated structure and diamond emitter morphologies in triode-type field emission arrays [J].
Chen, CF ;
Hsieh, HC .
DIAMOND AND RELATED MATERIALS, 2000, 9 (3-6) :1257-1262
[3]   Fabrication of 0.1 μm gate aperture Mo-tip field-emitter arrays using interferometric lithography [J].
Choi, JO ;
Jeong, HS ;
Pflug, DG ;
Akinwande, AI ;
Smith, HI .
APPLIED PHYSICS LETTERS, 1999, 74 (20) :3050-3052
[4]   Electron field emission characteristics of planar diamond film array synthesized by chemical vapor deposition process [J].
Lee, JS ;
Liu, KS ;
Lin, IN .
APPLIED PHYSICS LETTERS, 1997, 71 (04) :554-556
[5]   RAMAN FINGERPRINTING OF AMORPHOUS-CARBON FILMS [J].
TAMOR, MA ;
VASSELL, WC .
JOURNAL OF APPLIED PHYSICS, 1994, 76 (06) :3823-3830
[6]   RESONANT RAMAN-SCATTERING OF AMORPHOUS-CARBON AND POLYCRYSTALLINE DIAMOND FILMS [J].
WAGNER, J ;
RAMSTEINER, M ;
WILD, C ;
KOIDL, P .
PHYSICAL REVIEW B, 1989, 40 (03) :1817-1824
[7]   A nanotube-based field-emission flat panel display [J].
Wang, QH ;
Setlur, AA ;
Lauerhaas, JM ;
Dai, JY ;
Seelig, EW ;
Chang, RPH .
APPLIED PHYSICS LETTERS, 1998, 72 (22) :2912-2913
[8]   High-voltage triode flat-panel display using field-emission nanotube-based thin films [J].
Xu, NS ;
Wu, ZS ;
Deng, SZ ;
Chen, J .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2001, 19 (04) :1370-1372
[9]   Microchannel plate for high-efficiency field emission display [J].
Yi, W ;
Jin, S ;
Jeong, T ;
Lee, J ;
Yu, S ;
Choi, Y ;
Kim, JM .
APPLIED PHYSICS LETTERS, 2000, 77 (11) :1716-1718
[10]   GENERATION OF DIAMOND NUCLEI BY ELECTRIC-FIELD IN PLASMA CHEMICAL VAPOR-DEPOSITION [J].
YUGO, S ;
KANAI, T ;
KIMURA, T ;
MUTO, T .
APPLIED PHYSICS LETTERS, 1991, 58 (10) :1036-1038