Development of a focused ion beam (FIB) technique to minimize X-ray fluorescence during energy dispersive X-ray spectroscopy (EDS) of FIB specimens in the transmission electron microscope (TEM)

被引：21

作者：

Longo, DM ^{[1
]}

Howe, JM ^{[1
]}

Johnson, WC ^{[1
]}

机构：

[1] Univ Virginia, Sch Engn & Appl Sci, Dept Mat Sci & Engn, Charlottesville, VA 22903 USA

来源：

ULTRAMICROSCOPY | 1999年 / 80卷 / 02期

基金：

美国国家科学基金会;

关键词：

transmission electron microscopy; focused ion beam; energy dispersive X-ray spectroscopy (EDS); specimen preparation;

D O I：

10.1016/S0304-3991(99)00081-9

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

A method of specimen preparation utilizing the focused ion beam (FIB) was developed to minimize X-ray fluorescence during energy dispersive X-ray spectroscopy (EDS) of FIB-prepared specimens in the transmission electron microscope (TEM). The method involves fabricating a specially shaped geometry called an ultra-wide double-wedge (UWDW). It was tested on polycrystalline Ni thin film (50 nm) - single-crystal Si substrate diffusion couples. The UWDW FIB method dramatically reduced the amount of extra X-ray counts and fluorescence from the specimens, thereby enabling the use of quantitative EDS to analyze FIB-prepared specimens. (C) 1999 Elsevier Science B.V. All rights reserved.

引用

页码：69 / 84

页数：16

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