RF magnetron sputtered perovskite-oriented PSZT thin films on gold for piezoelectric and ferroelectric transducers

被引：3

作者：

Bhaskaran, M ^{[1
]}

Sriram, S ^{[1
]}

Holland, AS ^{[1
]}

机构：

[1] RMIT Univ, Microelect & Mat Technol Ctr, Sch Elect & Comp Engn, Melbourne, Vic 3001, Australia

来源：

ELECTRONICS LETTERS | 2006年 / 42卷 / 04期

关键词：

D O I：

10.1049/el:20063422

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Conditions for depositing perovskite-oriented Pb0.92Sr0.08(Zr0.65Ti0.35) O-3 thin films on gold by RF magnetron sputtering are investigated. Deposition results were analysed by scanning electron microscopy, X-ray photoelectron spectroscopy and X-ray diffractometry. It was found that the desired perovskite phase can be obtained at a substrate temperature of 300 degrees C, much lower than the typically reported 650 degrees C for deposition on platinum.

引用

页码：244 / 245

页数：2

共 5 条

[1]

HOLLAND AS, 2004, FORMATION LEAD LANTH

[2] N2O reactive gas effect on rf magnetron sputtered Pb(Zr0.52Ti0.48)O3 thin films [J].